Abstract

A geometrical optical model for the image formation of Makyoh (ormagic-mirror) topography is presented. General relations are given on theoptical settings. The basic equations of the imaging are derived. Fundamentalfeatures of the imaging are pointed out, and optimum working conditions areestablished. Simulations of the image of an isolated defect (hillock ordepression) and a periodic (sinusoidal) surface are presented for differentoptical settings. Supporting experimental images are presented.

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