Abstract
The limiting thickness uniformity attainable for the coating of multiple substrates inside a thermal evaporation physical vapor deposition (PVD) unit is theoretically analyzed. This study compares the classical spherical (dome-shaped) calotte with a plane sectors reversible lens holder setup. This arrangement is very useful for two-sides substrate deposition, such as antireflection coatings on lenses. The design of static correcting shutters for this kind of configuration is also discussed. Some results of this theoretical study are presented.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
