Geometrical characterization techniques for microlens made by thermal reflow of photoresist cylinder

Abstract

Microlens characterization is a prerequisite for improving fabrication process, and for satisfying the end user needs. In this paper we explore techniques to characterize geometrical properties of microlens made by thermal reflow: viz. microlens profile; radius of curvature; microlens height; contact angle and focal length. The geometrical characterization is done using techniques such as contact profilometry, scanning electron microscopy (SEM), optical microscopy, white light confocal microscopy and fluorescence confocal microscopy. All the above techniques are studied and compared, keeping in mind the characterization requirements of polymer microlens made by thermal reflow technique.