Abstract

Inclined crystallographic planes of the wurtzite structure were investigated in comparison with the zincblende structure in terms of surface geometry characteristics. The ball–stick model indicates that the semipolar $$ \left( {1{\bar 1} 01} \right) $$ surface possesses a surface polarity resembling the anion polarity, which agrees with the common experimental observations of epitaxial growth preference for the cation-polarity $$ \left( {1{\bar 1} 0{\bar 1} } \right) $$ surface over the $$ \left( {1{\bar 1} 01} \right) $$ surface. The wurtzite $$ \left\{ {11{\bar 2} 2} \right\} $$ surface was found to share geometrical similarities with the zincblende {100} surface uniquely among the possible semipolar planes. This finding encourages epitaxial growth on the $$ \left\{ {11{\bar 2} 2} \right\} $$ plane of wurtzite semiconductors, e.g., GaN, with the potential of avoiding atomic step formations typically associated with off-axis crystallographic planes.

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