Genesis of MEMS Accelerometers for Select the Optimal Accelerometer for Bio Applications

Abstract

MEMS(Micro Electro Mechanical Systems) Accelerometer is most popular and successful MEMS device for its versatile and multipurpose applications in different fields capable of measuring wide range of parameters ranging from vibration, acceleration, tilt and shock1. Accelerometers, individually have their own operation and are also used in conjunction with other devices like gyroscopes, switches to make unique special devices like Inertial Measurement unit, widely used in consumer electronics, giving MEMS Accelerometers the giant share in the whole MEMS market. They have arrived as successful marketed devices in various designs and served many application in the fields of automobile , navigation, bio medical and space applications2. These devices have diversified structural design and work on different principles, making them worth a study in terms of classification, selection for suitable application. Having the advantage of being cost effective and of little form factor, these devices have greater scope in various domains where the mechanical movements are needed to be analyzed. There is a huge unexplored area of BIO MEMS into which Accelerometers have to stretch their boundaries making Human body specific applications akin and par the present research. The present paper consolidates the existing accelerometers focusing on their applications while analyzing them in the light of their significance in each field of application. There is a great space for domain specific designing of the accelerometers trending into the usage in the current times.