Generic tool for modelling and simulation of semiconductor intrabay material handling system

Abstract

Semiconductor manufacturing facilities are migrating to 300mm technology, necessitating the implementation of automated material handling systems (AMHS) for a variety of ergonomic and safety considerations. A predictive tool, such as software simulation, is needed at the planning stage to estimate the performance of these relatively new systems. Two forms of AMHS are in general use in industry one which handles material within a group of machines (a bay) and one which transfers material between bays. This paper presents a generic tool for modelling and simulation of an intrabay AMHS. The model utilises a library of different blocks representing the different components of any intrabay material handling system, providing a tool that allows rapid building and analysis of an AMHS under different operating conditions. The ease of use of the system means that inexpert users have the ability to generate good models.