Generation of X-Rays in the SEM Specimen

Joseph I. Goldstein,Eric Lifshin,Linda Sawyer,David C. Joy,Charles E. Lyman,Patrick Echlin,Joseph R. Michael,Dale E. Newbury

doi:10.1007/978-1-4615-0215-9_6

Generation of X-Rays in the SEM Specimen

Joseph I. Goldstein, Eric Lifshin + Show 6 more

https://doi.org/10.1007/978-1-4615-0215-9_6

Copy DOI

Publication Date: Jan 1, 2003

Citations: 15

Affiliation: University of Massachusetts Amherst, Albany State University, University at Albany, State University of New York, University of Tennessee at Knoxville, Lehigh University, Sandia National Laboratories, National Institute of Standards and Technology

#SEM Specimen #Generation Of X-rays + Show 8 more

Abstract
Full-Text PDF
Similar Papers

Abstract

The electron beam generates x-ray photons in the beam–specimen interaction volume beneath the specimen surface. X-ray photons emerging from the specimen have energies specific to the elements in the specimen; these are the characteristic x-rays that provide the SEM’s analytical capabilities (see Fig. 6.1). Other photons have no relationship to specimen elements and constitute the continuum background of the spectrum. The x-rays we analyze in the SEM usually have energies between 0.1and 20 keV. Our task in this chapter is to understand the physical basis for the features in an x-ray spectrum like that shown in Fig. 6.1.

Full Text