Abstract
Generation of THz radiation by photoconductive antennas on based thin films InGaAs and InGaAs/InAlAs.
Highlights
The low substrate temperatures result in a nonstoichiometric growth with the incorporation of excess arsenic in the crystal structure
A possible approach to increase the resistivity of low-temperature grown (LT)-InGaAs structures is to employ LTInGaAs/InAlAs superlattices [6,13,16,17]
LT-InAlAs layers have a higher dark resistivity as compared to LT-InGaAs and exhibit deep trap states that are situated energetically below the antisite defect levels of adjacent InGaAs layers that results in a reduction of residual carrier concentration
Summary
The low substrate temperatures result in a nonstoichiometric growth with the incorporation of excess arsenic in the crystal structure. The most common non-stoichiometry-related point defects in LTarsenides are arsenic antisites with concentrations in the range 1017–1019 cm-3 depending on the substrate temperature and arsenic overpressure [7,8,9,10].
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