Abstract
A new method of obtaining the spatial derivative of out-of-plane displacements in a moire interferometry setup is presented. It is based on the recently developed concept of conjugate lateral shear interferometry applied to the diffracted beams generated by the specimen grating. The moire fringes produced by overlapping the two interferograms give the desired information using either the uniform or finite fringe detection method. Simulation experiments using specially prepared transmission-type distorted gratings are given to verify the principles.
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