Abstract
The radio frequency induction thermal plasma of sufficiently high electric power for materials processing has been successfully generated with a pulsemodulated operating condition. A solid-state amplifier, which supplies the electric power with a nominal frequency of 1 MHz, was employed for the pulsing plasma generation. The Ar–H2 plasma was generated at a high power level of 17 kW at atmospheric pressure. Typically, the plasma remained stable until the pulse duty factor went down to 30%, when the period of the high power level was 5 ms and the low power level was about 6 kW.
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