Abstract
The scheme generating UV pulses with a duration and output energy up to is implemented in the system consisting of a picosecond laser with multistage nonlinear-optical conversion of fundamental frequency radiation into radiation with a wavelength followed by an excimer ArF amplifier. The temporal characteristics and the contrast of the amplified pulses are measured.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have