Abstract
We present a bottom-up fabrication route based on the sputtering gas aggregation source that allows the generation of nanoparticles with controllable and tunable chemical composition while keeping the control of the cluster size. We demonstrate that the chemical composition of the particles can be monitored by the individual adjustment of the working parameters of the magnetrons inserted in a gas aggregation zone. Such control of the parameters leads to a fine control of the ion density of each target material and hence to the control of the chemical composition of the nanoparticles. In particular, we show through X-ray photoemission, atomic force microscopy, and high-resolution transmission electron microscopy that it is possible to generate bimetallic (AgAu) and trimetallic (AgAuPd) alloy nanoparticles with well-defined and tunable stoichiometries from three targets of pure Ag, Au, and Pd. The proposed route for the generation of nanoparticles opens new possibilities for the fabrication of nanoparticles using a physical method that, for some applications, could be complementary to the chemical methods.
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