Abstract
In this study, distinct regions of trapped charges on glass substrates created by electronbeam bombardment were utilized to attract and to immobilize DNA molecules. Thenegatively charged DNA molecules were attracted by the positive charge layerbeneath the substrate surface resulting from escape of secondary electrons. Withthis mechanism, we demonstrated high-precision patterning of unmodified DNAmolecules, independent of the length, sequence, and number of DNA strands, andwith an attachment to the glass surface strong enough to withstand vigorouswashing with water. DNA patterns with the line width of 50 nm were achieved.
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