Abstract
An electron cyclotron resonance (ECR) plasma source 16 cm in diameter using a planar ring-cusp magnetic field and a reentrant coaxial cavity was developed. The planar ring-cusp magnetic field produces a large-area ECR surface, and the reentrant coaxial cavity efficiently introduces microwaves into the ECR surface. Large-area, uniform and stable plasmas were generated with a mixture of H 2+CH 4+O 2 for diamond synthesis. The film deposited by means of the plasma CVD method was made of particles with high-quality crystal habit and with the typical diamond Raman spectrum.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
