Abstract

We present two major advances of enhancement-cavity-based high-order har- monic generation (HHG). First, the generated extreme ultraviolet (XUV) radiation is cou- pled out collinearly through an on-axis opening in the mirror following the HHG focus. This minimizes the interaction of both the fundamental and the intracavity generated ra- diation with the output coupler while simultaneously enabling a large enhancement and an output coupling efficiency that increases with the harmonic order. Second, we use the nonlinearly compressed pulses of an Yb-based laser to drive intracavity HHG allowing for a unique power regime combining short pulses with high average powers. Together, these advances overcome fundamental limitations of current enhancement cavity setups and extend intracavity HHG towards higher photon energies. In a proof-of-principle ex- periment we use a 3-kW and 78-MHz train of 54-fs to generate and couple out coherent sub-20 nm radiation.

Highlights

  • In all high-order harmonic generation (HHG)-enhancement cavity (EC) the spatial separation of the generated harmonic radiation from the fundamental beam and, coupling out of the XUV relies on reflection or diffraction, precluding a performance scaling of these concepts towards significantly higher photon energies

  • XUV output coupling through an on-axis opening in the mirror following the focus minimizes the interaction of both the fundamental and the generated radiation with the output coupler (OC) while simultaneously allowing for a large enhancement and output coupling efficiency

  • The hole-OC allows for the first time efficient photon-energy-scalable collinear XUV output coupling without introducing additional dispersion, nonlinearities or polarization discrimination for the fundamental radiation

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Summary

Introduction

In all HHG-ECs the spatial separation of the generated harmonic radiation from the fundamental beam and, coupling out of the XUV relies on reflection or diffraction, precluding a performance scaling of these concepts towards significantly higher photon energies. In this contribution we present two major advances in the femtosecond EC technology. Sub-100 fs pulses are enhanced to several kW of average power and the generation of sub-20nm coherent radiation with the Gaussian fundamental transverse mode of a resonator is demonstrated This concept is simultaneously scalable towards higher generated photon energy and photon flux and towards shorter pulses

Experimental Setup and Results
Findings
Conclusions and Outlook
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