Abstract
An inductively coupled argon (Ar) plasma is superimposed on a silicon (Si) plasma generated by an electron beam gun in order to realize the formation of gas-atom encapsulated Si cage clusters. The Si clusters, which are formed and deposited on a substrate, are analyzed by laser-desorption time-of-flight mass spectrometry and are found to have the mass spectra of not only pure Si cluster (Sin; n=1–17) but also Si cluster doped with Ar atom (ArSin; n=10–20) in the case that the large amount of Ar ions is generated in addition to the Si plasma. Together with the analysis of x-ray photoelectron spectroscopy, it is revealed that the Ar atom is included in the Si cluster, forming the structure of endohedral Ar@Sin complexes. Furthermore, the mass spectrum of Ar@Sin indicates the existence of the magic numbered cluster size n=15, 16 similar to the metal encapsulated Si clusters.
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