Generation and focusing of submilliwatt-average-power 50-nm pulses by the fifth harmonic of a KrF laser

Abstract

We demonstrate generation and focusing of 49.7-nm pulses with an average power of 0.1 mW at 200 Hz and with a pulse energy of >1 microJ at 10 Hz by the fifth harmonic of a femtosecond KrF laser. The fifth harmonic is selected and focused with a concave Sc/Si multilayer mirror to a diameter of 2microm, resulting in a peak intensity of 0.5 TW/cm(2), which will make extreme-ultraviolet nonlinear optics feasible. A novel single-shot linear in situ method of spot-size measurement by use of self-trapped exciton luminescence is also demonstrated.