Abstract
Cylindrical vector beams have been widely used in material processing, lithography, optical trapping and manipulating. However, few works discussed their application in polarization metrology. A cylindrical vector beam generated by a concrete interferometer setup is employed to determine the ellipsometric parameters of thin films, which was discussed in this work. A TEM01 mode beam was applied as the light source impinging into a modified Michelson interferometer with contiguous optical elements. The mode of light beam was transformed and the polarization states were coordinated with the optical configuration that made the output beam a doughnut-shaped axially symmetric polarized beam. In addition, the output beam plays the same role as rotating polarization element configuration of an ellipsometer. However, the polarization modulation was in spatial domain instead of temporal domain. By making use of this configuration, ellipsometric parameters of thin films were deduced and the results were very close to theoretical values.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
