Generalized frequency shift and attenuation in simply-supported micro/nano-beam resonators with thermoelastic dissipation

Abstract

The low frequency shift, weak frequency attenuation, and large quality factor (Q) are strongly required for micro/nano-resonators with excellent operation performance. Therefore, the accurate predictions of frequency shift, frequency attenuation, and Q based on thermoelastic dissipation (QTED ) are significant when optimally designing micro/nano-resonators. In this work, employing the modified-couple-stress (MCS) and nonlocal-single-phase-lag (NSPL) models, the generalized analytical expressions of the frequency-shift ratio, frequency-attenuation ratio, and QTED are first proposed for the simply-supported micro/nano-beam resonator with two-dimensional (2D) heat conduction. In the modeling procedure, utilizing the Galerkin approach, the function of 2D fluctuation temperature is solved from the governing equation of NSPL thermoelasticity. For simplicity, the function of one-dimensional (1D) fluctuation temperature is presented directly. Various expressions of complex natural frequency are obtained from the governing equation of MCS vibration with thermoelastic coupling, and then the models of the frequency-shift ratio, frequency-attenuation ratio, and QTED are developed based on the relevant expressions of complex natural frequency. It is confirmed that the present developed models with generality can effectively degenerate into the classical models. In the simulation cases, silicon (Si) that is a representative semiconductor material is selected. Results reveal that the MCS size-dependence effect can affect the frequency shift more markedly than the NSPL and heat-conduction-dimension (HCD) effects. Moreover, for the beam with a small thickness and operated in a high-order mode, the NSPL and HCD effects will significantly determine behaviors of the frequency shift, frequency attenuation, and QTED .