Abstract
This paper will introduce some basic micromachining technology. Photolithography, in different forms, is a key part of silicon, LIGA, and Excimer (ultraviolet) Laser micromachining. Some basic techniques and structures that can be produced by silicon micromachining will be discussed, as well as simple sensing and actuation methods. Diamond sawing and turning will be briefly mentioned, as well as problems associated with microdevice assembly and packaging.
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