Abstract

New types of miniature (1.2 mm diameter×1.0 mm long) temperature sensors based on germanium (Ge) films and silicon diodes have been developed and produced. The Ge-film microthermometers are intended for use at temperatures from 1 to 400 K, and silicon microdiodes cover operating temperature range from 2 to 600 K. The designs of sensitive elements and miniature package as well as sensor characteristics are presented.

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