Abstract
This paper deals with the determination of by-products formed in plasmas fed with hexamethyldisiloxane (HMDSO), oxygen, and Ar. The gas effluent has been sampled by means of a cold trap and analyzed using gas chromatography-mass spectrometry. The results indicate that under the experimental conditions utilized, HMDSO is not activated by reactions with oxygen but mainly by electron collisions. Oxygen controls the overall chemistry of the plasma since it influences the quali-quantitative distribution of by-products. Many linear and cyclic oligomers have been observed and most of them contained one or more―Me2SiO― groups. The concentration of detected by-products, except trimethylsilylformate, decreases with O2 addition.
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