Abstract
The reliability of SiC MOSFETs under harsh operating conditions, such as short circuit (SC) stress, remains a major concern. In this article, a dedicated aging platform is developed to study the degradation of SiC planar- and trench-gate MOSFETs under repetitive SC conditions. The static characteristics of the devices are monitored in real-time during the test. Depending on the gate bias used in the experiments, a bidirectional <inline-formula> <tex-math notation="LaTeX">${V}_{\text {TH}}$ </tex-math></inline-formula> shift in both types of devices is observed, yet with a different degradation rate. The underlying degradation mechanisms investigated by device simulation reveal that the damaged region in the SiC planar-gate MOSFET is located near the channel area, while at the trench corner in the SiC trench-gate MOSFET. These research outcomes enable better understanding of the degradation mechanisms of different SiC MOSFET structures and possible ruggedness improvements in the future.
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