Gas-phase ion chemistry of silane with ethane and ethyne

Abstract

Abstract Silane–ethane and silane–ethyne systems have been studied by ion trap mass spectrometry and the variation of the abundances, with reaction time, of the ions containing silicon and carbon together in 5:1, 1:1 and 1:5 mixtures, have been reported. The best ion yield, which increases with the total pressure, is observed for 1:1 silane–ethyne mixture. Reaction mechanisms and rate constants of the first nucleation processes have been determined. In SiH 4 –C 2 H 2 systems, the formation of ions containing new SiC bonds occurs starting mainly from Si m H n + ions in the first steps, whereas the Si m C n H p + cluster species further reacts with high efficiency in processes with ethyne.