Abstract
An extensive TEM study of the microstructure of TIP-30 Be implanted with 3 and 10 keV D ions to fluences, Φ in the range from 3 × 1020 to 8 × 1021D/m2 at temperatures, Tirr = 300, 500 and 700 K has been carried out. Depth distributions of separate D atoms and D2 molecules have been investigated by means of SIMS and RGA methods, correspondingly. D ion irradiation, accompanied by blistering, gives rise to destructions dependent mainly on Tirr. Irradiation at 300 K leads to the formation of tiny D2 bubbles of 1 run in size (reminiscent of He bubbles in Be). At Tirr ≥ 500 K, along with small facetted bubbles, the development of larger oblate cavities occurs accumulating most of injected deuterium and providing for a much higher gas swelling compared to that at 300 K. D (He) ion implantation leads to the enhanced growth of microcrystalline layers of cph-BeO oxide with a microstructure differing from that on the electropolished Be surface. Based on the analysis of experimental data deuterium reemission, thermal desorption and trapping in defects are discussed.
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