Abstract
Si-containing gas-separating membranes, produced by conventional chemical methods, demonstrate a high level of gas permeability. The plasma polymerization technique was used for membrane preparation from hexamethyldisiloxane (HMDSO). Plasma polymers were deposited under extremely different conditions. The gas-separating properties and surface morphology of the prepared membranes were investigated. The surface morphology depends strongly on the substrate surface: the plasma polymer on the porous substrate has a hemispherical macrostructure. The composite membrane with plasma polymer has permeability coefficients of the tested gases (O2, N2, He) comparable with those of the most permeable membrane produced by chemical methods. Such composite membranes demonstrate the higher selectivity for He/N2 gas pair.
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