Gas Sensor Based on the Network of SnO2 Semiconducting Nanowires

Abstract

ABSTRACTA simple and efficient way of preparing highly sensitive SnO2 nanowire-based gas sensors without an arduous lithography process was studied. The network of SnO2 nanowires could be suspended upon the Si substrate by separating the Au catalyst layer from the substrate. As the electric current is transported along the networks of the nanowires, not along the bottom layer on the substrate, the sensitivity to gases was maximized in the suspended and networked structures. The sensitivities were 18 and 180 when the NO2 concentrations were 0.5 and 5 ppm. The response time was typically 20-50 s.