Gas Sensitivity of MnO<sub>2</sub> Doped Nano ZnO Coplanar Plate-Type Gas Sensor Arrays

Abstract

Based on the integrated technologies of screen printing and hydrothermal method, this paper introduced a new integrative method with materials microstructure controlled growth and gas sensor fabrication. For example,based on space positioning using screen printing and ZnO nanwall with large specific surface area induced by hydrothermal method on the surface of ZnO film, the MnO2 doped nano ZnO coplanar plate-type gas sensor arrays with a good gas sensitivity to formaldehyde were fabricated successfully. The results show that the sensitivity to formaldehyde of MnO2 doped nano ZnO gas sensor arrays fabricated by hydrothermal method in 0.01mol/L Zn(NO3)2 solution, 95°C for 5h on the surface of MnO2 doped nano ZnO film and sintering at 500°C for 2h is higher than that of in distilled water. The existence of ZnO nanwall with large specific surface area induced by hydrothermal method on the surface of MnO2 doped nano ZnO film is the important reason of improvement for the sensitivity to formaldehyde.