Abstract
The thick film sensor of tungsten oxide for NO 2 gas detection was fabricated by changing the process conditions, which were firing temperature and annealing atmosphere. The origin of sensor property variation was interpreted by the characterization of crystallite size, specific surface area and microstructure. The degree of oxygen deficiency in the WO 3 sensor also affected sensor properties and the optimum oxygen content of WO 3 was necessary to get high sensitivity for NO 2. The WO 3 thick film fired at 700°C and operated at 100°C showed excellent sensor properties, and its operation temperature is lower than that from other reports.
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