Abstract
We fabricated a micro gas sensor for hydrogen sulfide (H2S) gas using MEMS technology and the sol-gel process, and synthesized SnO2-CuO as a sensing material by the sol-gel method. Synthesized particles of SnO2-CuO were characterized with an average particle size of about 40 nm as measured by FE-SEM imagery and XRD peaks. The sensing material was coated on the micro platform and annealed at 400 °C. The maximum gas sensitivity (Rs= Rg/Ra) was 0.005 at 300 °C for 1.0 ppm — H2S. The gas sensitivity showed linear behavior with increasing H2S concentration.
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