Abstract
Metal-organic precursor solution for coating was synthesized using Ti alkoxide derivative, amino acid, platinum salt and methanol as a solvent, in which TiO 2 sol was also added to control the pore structure. This solution was spin coated on glass substrate and pretreated in wet air, followed by firing in 3% H 2/Ar. The thin film fired at 450°C showed the highest gas sensitivity and selectivity to H 2. However, the film fired at 600°C showed no sensitivity to reducing gases. In contrast, high gas sensitivity and selectivity to H 2 was observed on the film fired in NH 3 at 600°C, in which the solid solution of nitrogen into TiO 2 was observed. The firing in NH 3 is considered to suppress the degradation of sensitivity resulting from SMSI.
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