Abstract
Nanostructured Indium(III) oxide (In2O3) films deposited by low temperature pulsed electron deposition (LPED) technique on customized alumina printed circuit boards have been manufactured and characterized as gas sensing devices. Their electrical properties have monitored directly during deposition to optimize their sensing performance. Experimental results with oxidizing (NO2) as well as reducing (CO) gases in both air and inert gas carriers are discussed and modeled.
Highlights
In recent years, Indium(III) oxide (In2 O3 ) has shown a potential as a promising new material for gas sensing applications, in particular suitable for the detection of low concentrations of oxidizing gases like O3, NOx, and Cl2 [1,2,3,4]
It was shown that In2 O3 -based gas sensors may have sufficient sensitivity and good selectivity toward some reducing gases [5,6], this latter property strongly depending on the preparation route and surface stoichiometry
It is known that sensing performance of a metal oxides sensor is mainly regulated by its microscopic morphology and defect chemistry, material properties largely depending on the manufacturing process
Summary
Indium(III) oxide (In2 O3 ) has shown a potential as a promising new material for gas sensing applications, in particular suitable for the detection of low concentrations of oxidizing gases like O3 , NOx , and Cl2 [1,2,3,4]. It is known that sensing performance of a metal oxides sensor is mainly regulated by its microscopic morphology and defect chemistry, material properties largely depending on the manufacturing process In this regard, performance of gas sensors has been shown to be really boosted by using nano-structured materials [1,2,3,6]. In2 O3 nano-structured films have been manufactured by many different techniques such as chemical vapor deposition, thermal oxidation of In films, spray pyrolysis, sol–gel, atomic layer deposition, pulsed laser ablation, DC, and RF-sputtering [7]. These techniques generally require a complex processing for precursors to be formed in the environment of the deposition chamber. Reducing the film thickness and the grain size decreases the time constants of the gas response of In2 O3 -based gas sensors, and increases the response to oxidizing gases (thanks to an increased gas permeability of the film)
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