Abstract
The influence of Pt and Sb additives on the gas sensitivity of chemically deposited SnO x films has been investigated. The temperature dependence of the resistance change and response time of SnO x to various gases in the air has been measured. Particular attention is paid to the CO and H 2 sensitivities at an operating temperature t ⩽ 100 °C. The non-doped and Sb-doped SnO x films show a low gas sensitivity at t ≈ 100 °C. The resistance change and response time τ of Pt-doped films depend on the annealing temperature. The SnO 2:Pt samples annealed at low temperature ( t a < 400 °C) are gas sensitive but slow (τ = 50–500 s) at 100 °C. Annealing at t a ⩾ 700 °C leads to a considerable reduction of the gas sensitivity of Pt-doped films. The SnO x samples doped simultaneously with Pt and Sb show a high sensitivity to CO or H 2 and a fast response and recovery at t ⩽ 100 °C (τ ⩽ 2 s). These samples prove to be sensitive to ethanol, acetaldehyde and acetic acid, but not to O 2, CO 2, SO 2 and NO x .
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