Abstract
SnO 2— x thin films with added platinum are studied. The SnO 2— x thin films are prepared by reactive electron beam evaporation of sintered pellets of SnO 2 powder. The deposited films are dipped into an aqueous solution of H 2PtCl 6·6H 2O and heat treated. The surface structure and composition of the prepared films are investigated by electron spectroscopy for chemical analysis, Auger electron spectroscopy and X-ray diffractometry. The electrical properties of the thin films and the effect of Pt addition on the gas-sensing characteristics have also been investigated.
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