Abstract
Elastic scattering of beam ions on residual gas molecules results in peak broadening in partial pressure gauges. In magnetic mass spectrometers gas scattering is one of the main limitations to partial pressure sensitivity. For the case of a single focusing magnetic mass spectrometer the distribution of scattered beam ions along the focal plane is investigated theoretically and experimentally. It is shown that the minimum detectable partial pressure is approximately proportional to the square of the total pressure, the constant of proportionality depending on the relative mass difference between peaks. The results are compared with data obtained from a quadrupole type mass analyzer.
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