Abstract

Gas-phase synthesis of zinc oxide (ZnO) nanorods on silicon and glass substrates has been studied. Using the proposed method, arrays of ZnO nanorods can be grown on these substrates without preliminary deposition of a thin ZnO sublayer and/or metal catalyst. The influence of the temperature regime, substrate arrangement, and growth time on the synthesis is considered. The shape, dimensions, and orientation of nanorods have been studied by electron microscopy and X-ray diffraction. Luminescence spectra and X-ray diffraction patterns of oriented arrays of nanorods have been investigated.

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