Abstract
A gas mixture containing silicon tetrachloride, hydrogen and argon was selected as a model system to study gas-phase reactions activated by electron beam (e-beam). The process of the e-beam activated conversion of silicon tetrachloride into trichlorosilane is realized. In the optimal case, the yield of the process reaches 70%. Laser-induced breakdown spectroscopy was used for the study of kinetic phenomena in the gas phase. The time and wavelength resolved laser-induced plasma-emission spectra in gas mixtures over wavelengths from 350 to 850 nm were studied. Possible physical and chemical mechanisms of the e-beam activated gas-phase reactions are discussed.
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