Abstract
An amorphous silicon carbide (SiC) membrane was synthesized by counter-diffusion chemical vapor deposition (CDCVD) using silacyclobutane (SCB) at 788 K. The SiC membrane on a Ni-γ-alumina (Al2O3) α-coated Al2O3 porous support possessed a H2 permeance of 1.2 × 10−7 mol·m−2·s−1·Pa−1 and an excellent H2/CO2 selectivity of 2600 at 673 K. The intermittent action of H2 reaction gas supply and vacuum inside porous support was very effective to supply source gas inside mesoporous intermediate layer. A SiC active layer was formed inside the Ni-γ-Al2O3 intermediate layer. The thermal expansion coefficient mismatch between the SiC active layer and Ni-γ-Al2O3-coated α-Al2O3 porous support was eased by the low decomposition temperature of the SiC source and the membrane structure.
Highlights
Silicon carbide (SiC) membranes with high strength and high chemical stability can be used under high pressure and corrosive atmospheres at elevated temperatures
The synthesis of SiC membranes has been reported in polymer precursor pyrolysis and chemical vapor deposition (CVD)/chemical vapor infiltration (CVI)
Tungsten was deposited on the surface of the sampling area in the focused ion beam (FIB) system to protect the top pore size distribution of theion
Summary
Silicon carbide (SiC) membranes with high strength and high chemical stability can be used under high pressure and corrosive atmospheres at elevated temperatures. The synthesis of SiC membranes has been reported in polymer precursor pyrolysis and chemical vapor deposition (CVD)/chemical vapor infiltration (CVI). In the polymer precursor pyrolysis, many researchers have reported gas permeation behavior. Polycarbosilane (PCS) is converted to amorphous SiC by the heat treatment at >1073 K. PCS has been used as a pre-ceramic polymer. Shelekhin and co-workers synthesized a polymer/inorganic composite membrane on porous Vycor glass by the pyrolysis of PCS at
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