Abstract
This Letter outlines the experimental study of molecule dissociation effect on rf capacitive discharge burning. We show that for each ammonia pressure value there exists some threshold rf voltage value below which the dissociation degree does not exceed 3%, but at higher rf voltage it grows to 30%. Increasing NH3 dissociation degree accelerates the discharge current growth against rf voltage. The rf discharge remains in a weak-current α-mode at low as well as at high dissociation degree because all ammonia dissociation products possess ionization potentials exceeding that for NH3.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
