Abstract
Vertically-aligned resistive-type ZnO nanorod gas sensors have been successfully fabricated on alumina substrate with a patterned Pt-electrode by using sonochemical method. The responses are characterized by measuring resistance at 250 ° in the vacuum chamber where total pressure of 10 torr is maintained and various concentrations of dilute H2 or NO2 are injected. The gas sensors exhibit the responses of 7 % and 1650 % are respectively at 50 ppm of H2 and NO2, and increase as gas concentration rises to 1000 ppm. Compared with previous studies conducted at atmospheric pressure, the response to H2 gas measured at the vacuum is improved, while that to NO2 is similar, promising that ZnO nanorod gas sensors can be developed into high performance gas sensor for vacuum process.
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