Abstract

The size of micro- and nanofluidic devices accounts for their operation in modes that differ significantly from those for the corresponding macroscopic counterparts. Deep understanding of gas-dynamic processes occurring in micro- and nanofluidic systems opens new opportunities for the practical use of molecular transport at the micro- and nanoscale. Models and simulation methods with high reliability are described. The article also outlines the important flow parameters which must be considered in the first place to correctly simulate gas-dynamic processes in micro- and nanofluidic systems. The review will be useful as a reference for researchers interested in implementing preliminary analysis in the development and optimization of micro- and nanofluid devices.

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