Abstract
In article shown conditions of glow discharge existence at low pressures. Described possibility of organizing glow discharge at very low pressures due to the supersonic gas flow in a limited area of the discharge chamber. Procedure of supersonic flow regime calculating in vacuum chamber for coating deposition shown.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
