Abstract
This study developed an innovative gas-assisted microstructure elastic multiform UV imprint replication molding technology. It first designed and fabricated the upper closed gas chamber and lower four-directional extension open imprint chamber system. Then, ANSYS software was used to analyze the axial stress uniformity of the multiaxial extension of the flexible mold and design the extension angle. A gas-assisted elastic multiaxial UV imprinting system was designed. The imprint uniformity and stability were tested and discussed by gas-assisted pressing and pressure sensitive adhesive tape. After regulation and control of elastic multiform variation of the lower chamber, the four-axis microstructure component transfer printing was tested. The experimental results showed that the imprinting system proposed in this study effectively controls the imprint mold shape in the elastic range with the flexible mold, and the gas-assisted uniform pressing transfer printing replication proves that excellent complementary structures of imprint replication can be obtained. This process technology greatly reduces the time and energy consumption of microelectromechanical process, providing a faster and economical option.
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