Abstract
To adjust the high-frequency properties of the soft magnetic film, micro-patterned NiFe films were fabricated on a (100) silicon substrate by using photolithography and magnetron sputtering. Their gap-width were changed from 15 to 60 µm with the strip-length of 5 mm and strip-width of 30 µm. The morphology and magnetic properties of the films were examined by scanning electron microscopy, vibrating sample magnetometer and vector network analysis, respectively. Compared with the continuous NiFe film, the in-plane magnetic anisotropy field (H k ) of micro-patterned NiFe film improved from 0 to 43 Oe. And as the designed gap-width (d) increased from 15 to 60 µm, H k increased from 43 to 80 Oe. The resonance frequency f r is increased up to 8.6 GHz, which is mainly from the demagnetization field and the magnetostatics surface wave energy in our study system. Therefore, the patterned films controlled by various stripe gap-width will also be essential in future high-frequency device design procedures.
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