Abstract
We report on the first experimental demonstration of micromechanical feedback oscillators based on vibrating gallium nitride/aluminum nitride (GaN/AlN) heterostructure doubly-clamped string resonators (∼0.4–4 MHz) for real-time detection of middle ultraviolet (MUV) light. By exploiting the wide bandgap GaN/AlN hetero-structure and an optical-electrical feedback mechanism, the GaN/AlN string resonator-referenced oscillator exhibits frequency redshifts due to strong UV light absorption, with a measured responsivity of $\mathfrak{R}=-24 \text{Hz}/\text{nW}$ and a minimum detectable power of $\delta P_{\min}=6.7 \text{nW}$ . Such GaN/AlN heterostructure micromechanical feedback oscillators, together with the appealing GaN/AlN electromechanical and optical properties, hold promise for real-time UV photon sensing and radiation effects studies.
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