Abstract
Time-resolved measurements of gamma-electrons energy spectra in low-pressure capacitively coupled RF discharge are presented. Time dependence of the sheath voltage is calculated from experimental results and compared with theoretical predictions. Good quantitative agreement is observed for collisional sheath. In low pressure discharge sheath voltage time dependence is close to [1+cos(/spl omega//spl tau/)], which qualitatively corresponds to the theoretical results. Asymmetry of electron energy spectra for increasing and decreasing sheath voltage is observed and explained by divergence and convergence of electron trajectories in plasma (klystron-effect).
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