Gain improvement and microwave operation of 4H–SiC MESFET with a new recessed metal ring structure

Abstract

A new multi-recessed 4H-SiC MESFET with recessed metal ring for RF embedded circuits is proposed (MR2-MESFET). The key idea in the proposed structure is based on the elimination of the spaces adjacent to gate and stopped the depletion region extending towards drain and source and the reduction of the channel thickness between gate and drain to increase breakdown voltage (VBR); meanwhile the elimination of the gate depletion layer extension to source/drain to decrease gate-source capacitance (Cgs). The influence of multi-recessed drift region and recessed metal ring structures on the characteristics of the MR2-MESFET is studied by numerical simulation. The optimized results show that the VBR of the MR2-MESFET is 119% larger than that of the conventional 4H–SiC MESFET (C-MESFET); meanwhile maintain 85% higher saturation drain current. Therefore, the maximum output power density of the MR2-MESFET is 23.1W/mm compared to 5.5W/mm of the C-MESFET. Also, the cut-off frequency (fT) and the maximum oscillation frequency (fmax) of 24.9 and 91.7GHz are obtained for the MR2-MESFET compared to 11 and 40GHz of the C-MESFET structure, respectively. The proposed MR2-MESFET shows a maximum stable gain (MSG) exceeding 23.6dB at 3.1GHz which is the highest gain yet reported for SiC MESFETs, showing the potential of this device for high power RF applications.