Abstract
A piezoelectric linear ultrasonic microactuator with a cylindrical stator structure using electroformed Ni pipe is proposed. The length and diameter of the microactuator are about 8.2 and 2.0 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a 25 1.tm thick electroformed Ni pipe. Traveling wave propagation is generated on the electroformed Ni pipe in finite element method (FEM) simulations. In the experiment, the traveling wave propagation was observed by a laser Doppler vibrometer (LDV) system at the driving frequency of 701 kHz. Bi-directional motion of the slider was observed at the frequency of around 701 kHz and applied voltage V1 of 10 40 V_p-p. At this condition, the maximum output force and maximum velocity were about 0.6 mN at V_1 = 30 Vp_p and 27.3 mm/s at V_1 = 40 V_p-p, respectively.
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