Abstract

This paper presents a novel technique for temperature measurement of micro regions on a microdevice surface using temperature dependency of fluorescence intensity of Rhodamine B molecules. They were immobilized on a glass plate surface using the following procedure. First, a plate surface was activated using 02 plasma. Next, a self-assembled monolayer of amino groups was formed on the plate surface by dipping it in an APTES solution. Finally, the isothiocyanate group of a Rhodamine B isothiocyanate molecule was combined with the amino group on the plate surface. Temperature dependency of fluorescence intensity of immobilized Rhodamine B was checked in the air and in DI water. As a result, in both cases, the fluorescence intensity decreased linearly with increasing temperature and their relationship had low hysteresis. Moreover, Rhodamine B molecules were immobilized on a glass plate surface where two interdigitated comb-shaped microelectrodes were patterned, and the plate surface was submerged in PBS. When the amplitude of AC voltage applied between the electrodes was increased, the fluorescence intensity close to the microelectrode decreased gradually because the temperature increased due to Joule heat.

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