Abstract
The Scanning Thermal Microscope (SThM) which can measure temperature in micro to nanoscale has been studied. Previously, it was demonstrated that active thermometry with an analog feedback system can measure quantitative temperature. To reduce time and effort for preparation and operation of the SThM, we started to develop a digital system and an auto tuning sequence, which easily adjust feedback parameters for each individual probe and quickly evaluate probe property. The test of the auto-tuning sequence with a chip calorimeter showed a quick calibration of a temperature sensitivity of a thermopile sensor and determination of thermal resistance and heat capacity through a frequency response sequence. The test of the active thermometry operation showed that the system can control probe temperature similar to sample temperature with proper feedback parameters.
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